Predict oxide thickness using established engineering relationships. Explore trends, compare scenarios, and export project-ready results. Built for faster evaluations across fabrication and thermal studies.
Choose preset coefficients for a quick estimate, or enter custom A and B values for calibrated process data.
These sample rows use preset coefficients and show how thickness changes with different ambients, temperatures, and process times.
| Example | Ambient | Temperature (°C) | Time (hr) | Initial thickness (um) | Final thickness (um) |
|---|---|---|---|---|---|
| Case 1 | Dry | 950.00 | 1.00 | 0.0200 | 0.0463 |
| Case 2 | Dry | 1,050.00 | 2.00 | 0.0300 | 0.1439 |
| Case 3 | Wet | 950.00 | 0.50 | 0.0100 | 0.2014 |
| Case 4 | Wet | 1,100.00 | 1.50 | 0.0500 | 0.8430 |
This calculator applies the Deal–Grove linear-parabolic oxidation model:
x² + Ax = B(t + τ)
Here, x is final oxide thickness, A is the linear constant in um, B is the parabolic constant in um²/hr, t is process time in hours, and τ adjusts for starting oxide.
The closed-form thickness solution is:
x = [-A + √(A² + 4B(t + τ))] / 2
The time-shift term comes from the starting thickness:
τ = (xᵢ² + Axᵢ) / B
The target-time inversion uses:
t = (xₜ² + Axₜ) / B - τ
It estimates final oxide thickness, added growth, average growth rate, and target time using a linear-parabolic oxidation model. It also visualizes thickness over time.
Dry oxidation usually grows slower and can support thinner, denser films. Wet oxidation usually grows faster and is often chosen when thicker oxide is needed.
A indicates the transition scale between interface-limited and diffusion-limited behavior. Smaller thickness values relative to A usually lean toward the linear region.
B governs diffusion-driven growth. Larger B values usually increase thickness more strongly at longer oxidation times, especially once films become thicker.
Use custom values when you have measured line data, tool-specific calibration, or internal process models. That approach usually gives better agreement than generic presets.
τ accounts for an existing starting oxide. It lets the model begin from the initial film instead of incorrectly assuming a bare surface at time zero.
No. It supports estimation and comparison. Final process decisions should still rely on metrology, tool qualification, wafer history, and local calibration results.
Temperature uses degrees Celsius. Time uses hours. Thickness and A use micrometers. B uses micrometers squared per hour, and B/A uses micrometers per hour.
Important Note: All the Calculators listed in this site are for educational purpose only and we do not guarentee the accuracy of results. Please do consult with other sources as well.